Tempe, Arizona
United States
13
2026-04-30
The entities that hold a legal rights for patent applications filed by inventor CHEN Hui:
Hui CHEN from Tempe, US has applied for patents for these inventions. The list has both pending applications and granted patents:
RIM VENTED SUSCEPTOR
#2 | 2025-10-16CONTACT CLEANING UNITS IN CMP POLISHER
#3 | 2025-08-21SUSCEPTOR IMPROVEMENT
#4 | 2024-10-31GAS FLOW SUBSTRATE SUPPORTS, PROCESSING CHAMBERS, AND RELATED METHODS AND APPARATUS, FOR SEMICONDUCTOR MANUFACTURING
#5 | 2024-09-12BACK SIDE DESIGN FOR FLAT SILICON CARBIDE SUSCEPTOR
#6 | 2024-08-15OVERLAPPING SUBSTRATE SUPPORTS AND PRE-HEAT RINGS, AND RELATED PROCESS KITS, PROCESSING CHAMBERS, METHODS, AND COMPONENTS
#7 | 2024-05-02Detection and analysis of substrate support and pre-heat ring in a process chamber via imaging
#8 | 2024-02-29PAD SURFACE CLEANING DEVICE AROUND PAD CONDITIONER TO ENABLE INSITU PAD CONDITIONING
#9 | 2024-02-15Methods of forming silicon carbide coated base substrates at multiple temperatures
#10 | 2024-01-25METHOD OF COATING A CHAMBER COMPONENT
#11 | 2024-01-11FLAT SUSCEPTOR WITH GRID PATTERN AND VENTING GROOVES ON SURFACE THEREOF
#12 | 2023-04-13SUBSTRATE SUPPORT
#13 | 2022-11-17LOW MASS SUBSTRATE SUPPORT
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