Yu IMAMURA

City:

Tokyo

Country:

Japan

Published Applications:

Last publication date:

2025-01-02

Top Assignees for applications by Yu IMAMURA

The entities that hold a legal rights for patent applications filed by inventor IMAMURA Yu:

Ebara Corporation 1 Tokyo, Japan

Recent patent applications by IMAMURA Yu

Yu IMAMURA from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2025-01-02

US20250001472A1

Performing operations; transporting

SUBSTRATE CLEANING DEVICE, SUBSTRATE PROCESSING APPARATUS, BREAK-IN DEVICE, METHOD FOR ESTIMATING NUMBER OF FINE PARTICLES ADHERING TO SUBSTRATE, METHOD FOR DETERMINING DEGREE OF CONTAMINATION OF SUBSTRATE CLEANING MEMBER, AND METHOD FOR DETERMINING BREAK-IN PROCESSING

#2 | 2022-12-15

US20220395874A1

Performing operations; transporting

Substrate cleaning device, substrate processing apparatus, break-in device, method for estimating number of fine particles adhering to substrate, method for determining degree of contamination of substrate cleaning member, and method for determining break-in processing

InventorID:

5601807 ⎘