Eindhoven
Netherlands
3
2024-06-06
The entities that hold a legal rights for patent applications filed by inventor LIM Hui Quan:
Hui Quan LIM from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
METROLOGY TOOL CALIBRATION METHOD AND ASSOCIATED METROLOGY TOOL
#2 | 2024-02-01A SUBSTRATE COMPRISING A TARGET ARRANGEMENT, AND ASSOCIATED AT LEAST ONE PATTERNING DEVICE, LITHOGRAPHIC METHOD AND METROLOGY METHOD
#3 | 2023-06-08Substrate comprising a target arrangement, and associated at least one patterning device, lithographic method and metrology method
5762407 ⎘