Koshi
Japan
14
2024-07-18
The entities that hold a legal rights for patent applications filed by inventor Kai Yoshihiro:
Yoshihiro Kai from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
#2 | 2022-12-08Substrate processing system and substrate processing method
#3 | 2021-04-15Substrate processing system and substrate processing method
#4 | 2021-04-15Substrate processing system and substrate processing method
#5 | 2021-02-04Substrate processing apparatus and substrate processing method
#6 | 2020-11-19Substrate liquid processing apparatus, substrate liquid processing method and recording medium
#7 | 2020-07-16Substrate processing apparatus
#8 | 2018-11-22Substrate liquid processing apparatus, substrate liquid processing method and recording medium
#9 | 2017-10-05Substrate processing apparatus and substrate processing method
#10 | 2013-12-05Nozzle cleaning device, nozzle cleaning method, and substrate processing apparatus
#11 | 2012-12-27Two-fluid nozzle and substrate liquid processing apparatus and substrate liquid processing method
#12 | 2012-06-28Substrate liquid treatment apparatus with lift pin plate
#13 | 2012-06-28Substrate liquid cleaning apparatus with controlled liquid port ejection angle
#14 | 2011-02-03Assembly method of transfer mechanism and transfer chamber
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