Koshi
Japan
9
2023-09-14
The entities that hold a legal rights for patent applications filed by inventor Goshi Gentaro:
Gentaro Goshi from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate processing method and substrate processing system
#2 | 2022-06-30SUBSTRATE DRYING METHOD AND SUBSTRATE DRYING APPARATUS
#3 | 2022-04-28SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
#4 | 2021-05-27Substrate processing apparatus and substrate processing method
#5 | 2020-11-19Substrate liquid processing apparatus, substrate liquid processing method and recording medium
#6 | 2020-08-06Substrate processing apparatus and substrate processing method
#7 | 2019-11-21Substrate processing method, recording medium and substrate processing apparatus
#8 | 2019-02-14Substrate processing method, recording medium and substrate processing system
#9 | 2018-11-22Substrate liquid processing apparatus, substrate liquid processing method and recording medium
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