Koshi
Japan
34
2024-03-07
The entities that hold a legal rights for patent applications filed by inventor Enokida Suguru:
Suguru Enokida from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate processing apparatus and substrate processing method
#2 | 2023-04-06SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
#3 | 2022-10-06Substrate processing apparatus and substrate processing method
#4 | 2022-05-26Substrate processing apparatus and substrate processing method
#5 | 2021-09-23Substrate processing system and substrate processing method
#6 | 2020-02-27Substrate processing apparatus and method of adjusting substrate processing apparatus
#7 | 2019-10-31Treatment solution supply apparatus and treatment solution supply method
#8 | 2017-06-15Substrate processing apparatus and method of adjusting substrate processing apparatus
#9 | 2016-12-22Substrate treatment system, substrate transfer method and computer storage medium
#10 | 2016-12-22Substrate treatment system, substrate transfer method and computer storage medium
#11 | 2016-06-16Substrate processing apparatus, substrate processing system, and method of detecting abnormality in transport container
#12 | 2015-08-06Coating and developing apparatus and method
#13 | 2014-11-06Coating and developing apparatus and method, and storage medium
#14 | 2014-08-21Thermal processing apparatus for thermal processing substrate and positioning method of positioning substrate transfer position
#15 | 2013-12-12Coating and developing apparatus
#16 | 2013-06-27Transfer apparatus and transfer method
#17 | 2013-05-09Substrate treatment system, substrate transfer method and computer storage medium
#18 | 2013-05-09Substrate treatment system, substrate transfer method, and a non-transitory computer storage medium
#19 | 2013-03-28Substrate treatment system, substrate transfer method and non-transitory computer-readable storage medium
#20 | 2013-03-28Substrate processing apparatus, substrate processing method and storage medium
#21 | 2012-09-20Substrate holding device
#22 | 2012-09-06Substrate holder positioning method and substrate processing system
#23 | 2012-04-26Inspection device, inspection method and non-transitory storage medium for inspecting deformation of substrate holding member, and substrate processing system including the inspection device
#24 | 2012-03-15Coating and developing apparatus, coating and developing method and non-transitory tangible medium
#25 | 2012-03-08Coating and developing apparatus, coating and developing method and non-transitory tangible medium
#26 | 2012-03-08Coating and developing apparatus and method, and storage medium
#27 | 2012-01-19Coating and developing apparatus and method, and storage medium
#28 | 2012-01-19Coating and developing apparatus and method
#29 | 2012-01-12Coating and developing apparatus and method
#30 | 2012-01-12Coating and developing apparatus
#31 | 2010-12-23Substrate transfer method and apparatus
#32 | 2010-09-30Device and method for supporting a substrate
#33 | 2007-11-29Substrate transfer apparatus, substrate process system, and substrate transfer method
#34 | 2007-10-25Substrate carrying and processing apparatus
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