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Inventor profile of:

Eiki Kamata

City:

Nirasaki

Country:

Japan

Published Applications:

Last publication date:

2024-05-23

Top Assignees for applications by Eiki Kamata

The entities that hold a legal rights for patent applications filed by inventor Kamata Eiki:

TOKYO ELECTRON LIMITED 12 Tokyo, Japan

Recent patent applications by Kamata Eiki

Eiki Kamata from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2024-05-23

US20240170260A1

Electricity

PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING METHOD

#2 | 2023-10-19

US20230335876A1

Electricity

TUNER, AND IMPEDANCE MATCHING METHOD

#3 | 2021-07-22

US20210225612A1

Electricity

Array antenna and plasma processing apparatus

#4 | 2021-05-06

US20210134560A1

Electricity

Plasma processing apparatus and plasma processing method

#5 | 2021-04-29

US20210125814A1

Electricity

Control method and plasma processing apparatus

#6 | 2021-03-18

US20210082727A1

Electricity

Plasma processing apparatus

#7 | 2021-03-11

US20210074517A1

Electricity

Plasma processing apparatus and control method

#8 | 2021-03-11

US20210074516A1

Electricity

Plasma probe device, plasma processing apparatus, and control method

#9 | 2021-02-04

US20210035788A1

Electricity

Plasma processing apparatus and control method

#10 | 2021-02-04

US20210035787A1

Electricity

Plasma processing apparatus and control method

#11 | 2020-12-03

US20200381224A1

Electricity

Plasma density monitor, plasma processing apparatus, and plasma processing method

#12 | 2020-09-17

US20200294842A1

Electricity

Plasma processing apparatus

InventorID:

6004831 ⎘