Nirasaki
Japan
18
2020-10-01
The entities that hold a legal rights for patent applications filed by inventor Kondoh Keisuke:
Keisuke Kondoh from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate transporting method and substrate processing system
#2 | 2020-07-23Transfer apparatus
#3 | 2019-07-11Substrate gripping mechanism, substrate transfer device, and substrate processing system
#4 | 2019-05-23Substrate processing device
#5 | 2018-10-04Processing system
#6 | 2018-02-01Carrier transport device and carrier transport method
#7 | 2012-01-19Gate valve cleaning method and substrate processing system
#8 | 2011-07-21Delivery position aligning method for use in vacuum processing apparatus, vacuum processing apparatus and computer storage medium
#9 | 2010-07-08Positional deviation detection apparatus and process system employing the same
#10 | 2008-12-11Transfer/alignment method in vacuum processing apparatus, vacuum processing apparatus and computer storage medium
#11 | 2008-07-31Gate valve cleaning method and substrate processing system
#12 | 2008-02-07Intermediate transfer chamber, substrate processing system, and exhaust method for the intermediate transfer chamber
#13 | 2006-12-28Transfer apparatus for target object
#14 | 2006-06-29Substrate processing apparatus and transfer positioning method thereof
#15 | 2006-06-22Opening/closing mechanism for vacuum processing apparatus and vacuum processing apparatus using the same
#16 | 2006-03-28Articulated carrying device
#17 | 2005-11-17Delivery position aligning method for use in a transfer system and a processing system employing the method
#18 | 2005-09-27Positioning substrate for semiconductor process
6009026 ⎘