Inventor profile of:

Mitsuhiro Okada

City:

Nirasaki

Country:

Japan

Published Applications:

30

Last publication date:

2021-12-09

Top Assignees for applications by Mitsuhiro Okada

The entities that hold a legal rights for patent applications filed by inventor Okada Mitsuhiro:

Recent patent applications by Okada Mitsuhiro

Mitsuhiro Okada from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2021-12-09
US20210384071A1
Electricity

Method of manufacturing semiconductor device

#2 | 2021-03-25
US20210090887A1
Electricity

Silicon film forming method and substrate processing apparatus

#3 | 2020-08-13
US20200258748A1
Electricity

Substrate processing method and substrate processing apparatus

#4 | 2019-05-16
US20190144994A1
Chemistry; metallurgy

Cleaning method and film forming method

#5 | 2018-06-28
US20180179625A1
Chemistry; metallurgy

Film forming apparatus, film forming method and heat insulating member

#6 | 2017-12-14
US20170358458A1
Electricity

Method of manufacturing semiconductor device, heat treatment apparatus, and storage medium

#7 | 2017-10-05
US20170287914A1
Electricity

Method and apparatus for forming boron-doped silicon germanium film, and storage medium

#8 | 2017-10-05
US20170287778A1
Electricity

Method and apparatus for forming silicon film and storage medium

#9 | 2017-08-24
US20170243742A1
Electricity

Film forming method

#10 | 2016-06-30
US20160189957A1
Electricity

Method of forming silicon film

#11 | 2016-02-18
US20160049298A1
Electricity

Method of forming germanium film and apparatus therefor

#12 | 2015-06-11
US20150159295A1
Chemistry; metallurgy

Amorphous silicon crystallizing method, crystallized silicon film forming method, semiconductor device manufacturing method and film forming apparatus

#13 | 2015-04-16
US20150101532A1
Chemistry; metallurgy

Apparatus for forming silicon-containing thin film

#14 | 2015-02-05
US20150037975A1
Electricity

Method and apparatus for forming silicon film

#15 | 2015-02-05
US20150037970A1
Electricity

Silicon film forming method, thin film forming method and cross-sectional shape control method

#16 | 2014-09-25
US20140283750A1
Electricity

Batch-type vertical substrate processing apparatus and substrate holder

#17 | 2013-12-05
US20130323915A1
Electricity

Method and apparatus for forming silicon film

#18 | 2013-10-31
US20130288470A1
Electricity

Impurity diffusion method, substrate processing apparatus, and method of manufacturing semiconductor device

#19 | 2013-09-19
US20130244399A1
Electricity

Method of forming a laminated semiconductor film

#20 | 2013-05-02
US20130109155A1
Electricity

Method of forming seed layer and method of forming silicon-containing thin film

#21 | 2012-09-20
US20120238107A1
Electricity

Processing method for forming structure including amorphous carbon film

#22 | 2012-06-28
US20120164842A1
Electricity

Trench embedding method

#23 | 2011-08-11
US20110195580A1
Electricity

Method for forming laminated structure including amorphous carbon film

#24 | 2010-12-09
US20100311251A1
Electricity

Batch processing method for forming structure including amorphous carbon film

#25 | 2010-08-19
US20100210094A1
Chemistry; metallurgy

Method for using apparatus configured to form germanium-containing film

#26 | 2009-09-17
US20090233454A1
Chemistry; metallurgy

Film formation apparatus for semiconductor process and method for using same

#27 | 2009-05-14
US20090124077A1
Electricity

Method for forming poly-silicon film

#28 | 2009-01-29
US20090029562A1
Chemistry; metallurgy

Film formation method and apparatus for semiconductor process

#29 | 2008-11-20
US20080282976A1
Performing operations; transporting

Film formation apparatus and method for using the same

#30 | 2008-06-05
US20080132079A1
Chemistry; metallurgy

Film formation apparatus and method for using the same

InventorID:

6010272 ⎘