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Inventor profile of:

Katsuhiro Morikawa

City:

Koshi

Country:

Japan

Published Applications:

Last publication date:

2022-05-19

Top Assignees for applications by Katsuhiro Morikawa

The entities that hold a legal rights for patent applications filed by inventor Morikawa Katsuhiro:

TOKYO ELECTRON LIMITED 17 Tokyo, Japan
TOKYO ELECTRON LIMITED 5 Minato-ku, Japan

Recent patent applications by Morikawa Katsuhiro

Katsuhiro Morikawa from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2022-05-19

US20220154342A1

Chemistry; metallurgy

Substrate processing apparatus and substrate processing method

#2 | 2022-04-28

US20220130691A1

Electricity

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

#3 | 2022-01-20

US20220020611A1

Electricity

Substrate processing method

#4 | 2020-10-01

US20200312678A1

Electricity

Substrate processing apparatus and substrate processing method

#5 | 2020-04-02

US20200107404A1

Electricity

Substrate processing apparatus

#6 | 2020-04-02

US20200105574A1

Electricity

Substrate processing apparatus with moving device for connecting and disconnecting heater electrodes and substrate processing method thereof

#7 | 2020-04-02

US20200105550A1

Electricity

Substrate processing apparatus including periphery cover body

#8 | 2020-04-02

US20200102654A1

Chemistry; metallurgy

Substrate processing apparatus

#9 | 2020-01-09

US20200013666A1

Electricity

Substrate transfer device and substrate transfer method

#10 | 2017-12-14

US20170358479A1

Electricity

Substrate transfer device and substrate transfer method

#11 | 2017-06-22

US20170178935A1

Electricity

Substrate transfer method and storage medium

#12 | 2016-06-16

US20160172225A1

Electricity

Substrate processing apparatus, substrate processing system, and method of detecting abnormality in transport container

#13 | 2015-10-22

US20150300960A1

Physics

Substrate processing apparatus, method of operating substrate processing apparatus, and storage medium

#14 | 2015-08-20

US20150235888A1

Electricity

Substrate processing apparatus, method for correcting positional displacement, and storage medium

#15 | 2015-07-02

US20150187621A1

Electricity

Substrate processing apparatus

#16 | 2014-08-21

US20140234058A1

Electricity

Substrate transfer device, substrate processing apparatus, and substrate accommodation method

#17 | 2014-06-26

US20140178162A1

Electricity

Substrate transfer apparatus, substrate transfer method, and storage medium

#18 | 2011-10-20

US20110257783A1

Electricity

Substrate transfer method and substrate transfer apparatus

#19 | 2010-12-23

US20100321648A1

Electricity

Substrate transfer method and apparatus

#20 | 2010-09-30

US20100243168A1

Electricity

Device and method for supporting a substrate

#21 | 2007-08-23

US20070195297A1

Physics

Substrate carrying apparatus, substrate carrying method, and coating and developing apparatus

#22 | 2007-06-07

US20070128008A1

Electricity

Substrate transfer method and substrate transfer apparatus

InventorID:

6010276 ⎘