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Inventor profile of:

Teruhiko Kodama

City:

Koshi

Country:

Japan

Published Applications:

Last publication date:

2021-07-22

Top Assignees for applications by Teruhiko Kodama

The entities that hold a legal rights for patent applications filed by inventor Kodama Teruhiko:

TOKYO ELECTRON LIMITED 6 Tokyo, Japan
TOKYO ELECTRON LIMITED 5 Minato-ku, Japan

Recent patent applications by Kodama Teruhiko

Teruhiko Kodama from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2021-07-22

US20210220878A1

Performing operations; transporting

Substrate cleaning apparatus and substrate cleaning method

#2 | 2021-02-11

US20210039221A1

Performing operations; transporting

SUBSTRATE WARPAGE CORRECTION METHOD, COMPUTER STORAGE MEDIUM, AND SUBSTRATE WARPAGE CORRECTION APPARATUS

#3 | 2020-11-19

US20200365417A1

Electricity

Substrate processing apparatus

#4 | 2020-03-26

US20200096966A1

Physics

Substrate processing capable of suppressing a decrease in throughput while reducing the impact on exposure treatment caused by warping of a substrate

#5 | 2019-07-11

US20190212653A1

Physics

Substrate treatment apparatus, substrate treatment method, and computer storage medium

#6 | 2018-09-06

US20180253007A1

Physics

Substrate processing apparatus, substrate processing method and storage medium

#7 | 2018-01-18

US20180019112A1

Electricity

Liquid processing method, memory medium and liquid processing apparatus

#8 | 2017-05-18

US20170139399A1

Physics

Substrate processing apparatus, substrate processing method and memory medium

#9 | 2017-03-30

US20170092504A1

Electricity

Substrate processing method and substrate processing apparatus

#10 | 2016-04-07

US20160096203A1

Performing operations; transporting

Liquid processing method, memory medium and liquid processing apparatus

#11 | 2015-09-10

US20150255355A1

Electricity

Substrate processing apparatus, substrate processing method and memory medium

InventorID:

6010703 ⎘