Nirasaki
Japan
12
2024-09-05
The entities that hold a legal rights for patent applications filed by inventor Osada Yuki:
Yuki Osada from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
PLASMA PROCESSING APPARATUS
#2 | 2021-07-29Directional coupler for use in a substrate processing apparatus, where the directional coupler includes a coaxial line coupled to a conductor on a substrate
#3 | 2016-09-22Tuner, microwave plasma source and impedance matching method
#4 | 2016-08-04Plasma processing device with shower plate having protrusion for suppressing film formation in gas holes of shower plate
#5 | 2015-07-30Acquisition method for S-parameters in microwave introduction modules, and malfunction detection method
#6 | 2014-06-12Microwave radiation antenna, microwave plasma source and plasma processing apparatus
#7 | 2012-11-29Electromagnetic-radiation power-supply mechanism for exciting a coaxial waveguide by using first and second poles and a ring-shaped reflection portion
#8 | 2012-09-06Surface wave plasma generating antenna and surface wave plasma processing apparatus
#9 | 2012-03-22Tuner and microwave plasma source
#10 | 2009-02-12Plasma processing apparatus
#11 | 2008-12-18Magnetron control method, magnetron service life judgment method, microwave generation device, magnetron service life judgment device, processing device, computer program, and storage medium
#12 | 2005-07-28Plasma processing apparatus
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