Nirasaki
Japan
3
2021-07-29
The entities that hold a legal rights for patent applications filed by inventor Inoue Mitsuya:
Mitsuya Inoue from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Directional coupler for use in a substrate processing apparatus, where the directional coupler includes a coaxial line coupled to a conductor on a substrate
#2 | 2014-07-31Raw material gas supply method
#3 | 2012-07-19Film forming apparatus
6013561 ⎘