Mitsutoshi Ashida

City:

Nirasaki

Country:

Japan

Published Applications:

Last publication date:

2024-05-23

Top Assignees for applications by Mitsutoshi Ashida

The entities that hold a legal rights for patent applications filed by inventor Ashida Mitsutoshi:

TOKYO ELECTRON LIMITED 6 Tokyo, Japan

Recent patent applications by Ashida Mitsutoshi

Mitsutoshi Ashida from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2024-05-23

US20240170260A1

Electricity

PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING METHOD

#2 | 2021-07-29

US20210234248A1

Electricity

Directional coupler for use in a substrate processing apparatus, where the directional coupler includes a coaxial line coupled to a conductor on a substrate

#3 | 2013-03-14

US20130062341A1

Electricity

Microwave processing apparatus and control method thereof

#4 | 2012-08-23

US20120211486A1

Electricity

Microwave irradiation apparatus

#5 | 2011-09-08

US20110214811A1

Chemistry; metallurgy

Automatic matching method, computer-readable storage medium, automatic matching unit, and plasma processing apparatus

#6 | 2011-09-01

US20110209827A1

Electricity

Automatic matching unit and plasma processing apparatus

InventorID:

6013562 ⎘