Nirasaki
Japan
7
2025-02-20
The entities that hold a legal rights for patent applications filed by inventor Maeda Koji:
Koji Maeda from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
FILM FORMING APPARATUS AND FILM FORMING METHOD
#2 | 2022-06-09Film forming apparatus and film forming method
#3 | 2021-09-09Substrate processing apparatus and method
#4 | 2021-01-07Substrate transfer apparatus and substrate transfer method
#5 | 2020-11-26Stage device and processing apparatus
#6 | 2018-11-01Substrate processing apparatus
#7 | 2015-08-20Substrate processing apparatus
6026809 ⎘