Nirasaki
Japan
11
2021-09-30
The entities that hold a legal rights for patent applications filed by inventor Toriya Daisuke:
Daisuke Toriya from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate stage and substrate processing apparatus
#2 | 2020-08-06Method of controlling substrate processing apparatus, and substrate processing apparatus
#3 | 2020-05-28Substrate holder and film forming apparatus
#4 | 2020-03-26Placement apparatus and processing apparatus
#5 | 2020-01-09Film-forming apparatus
#6 | 2018-06-21Gas treatment apparatus and gas treatment method
#7 | 2016-12-08Film forming apparatus
#8 | 2016-03-24Film formation device
#9 | 2014-05-15Film forming apparatus
#10 | 2009-11-12Mounting table structure, and processing apparatus
#11 | 2005-06-02Processing device and method of maintaining the device
6031759 ⎘