Nirasaki
Japan
4
2021-09-30
The entities that hold a legal rights for patent applications filed by inventor Ikeda Kyoko:
Kyoko Ikeda from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate stage and substrate processing apparatus
#2 | 2018-09-27Gas supply member and gas processing apparatus
#3 | 2016-05-26Substrate transfer system and heat treatment apparatus using same
#4 | 2014-09-11Vaporizing unit, film forming apparatus, film forming method, computer program and storage medium
6032012 ⎘