Koshi
Japan
3
2020-11-26
The entities that hold a legal rights for patent applications filed by inventor Ayabe Go:
Go Ayabe from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate processing apparatus and substrate processing method
#2 | 2019-10-03Substrate processing apparatus, substrate processing method and recording medium of performing liquid exchange processing according to liquid exchange condition
#3 | 2017-03-02Substrate processing apparatus, substrate transport method, and computer-readable recording medium with stored substrate transport program
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