Koshi
Japan
3
2022-08-11
The entities that hold a legal rights for patent applications filed by inventor Sakazaki Tetsuya:
Tetsuya Sakazaki from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Dynamically adjusted purge timing in wet atomic layer etching
#2 | 2022-07-07Substrate processing device and etching liquid
#3 | 2021-02-04Substrate processing method, substrate processing device and etching liquid
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