Koshi
Japan
6
2022-04-07
The entities that hold a legal rights for patent applications filed by inventor Tanaka Koji:
Koji Tanaka from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate processing apparatus for supplying gas of water repellent agent and substrate processing method
#2 | 2020-06-18Substrate processing apparatus and processing liquid concentration method
#3 | 2018-12-13Substrate liquid processing apparatus
#4 | 2018-10-04Weighing apparatus, substrate liquid processing apparatus, weighing method, substrate liquid processing method and recording medium
#5 | 2018-08-02Substrate liquid treatment apparatus
#6 | 2015-12-31Flow-rate regulator device, diluted chemical-liquid supply device, liquid processing apparatus and its operating system
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