Oro Valley, Arizona
United States
6
2017-11-23
The entities that hold a legal rights for patent applications filed by inventor Smith Daniel Gene:
Daniel Gene Smith from Oro Valley, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Extreme ultraviolet lithography system that utilizes pattern stitching
#2 | 2014-01-09MEASUREMENT ASSEMBLY WITH FIBER OPTIC ARRAY
#3 | 2012-07-26TARGET FOR LARGE SCALE METROLOGY SYSTEM
#4 | 2010-03-04Exposure apparatus with an illumination system generating multiple illumination beams
#5 | 2009-12-10EXPOSURE APPARATUS WITH A SCANNING ILLUMINATION BEAM
#6 | 2009-02-19APPARATUS AND METHOD FOR TRANSFERRING FEATURES TO AN EDGE OF A WAFER
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