Yusuke Muraki

City:

Nirasaki

Country:

Japan

Published Applications:

Last publication date:

2021-09-16

Top Assignees for applications by Yusuke Muraki

The entities that hold a legal rights for patent applications filed by inventor Muraki Yusuke:

TOKYO ELECTRON LIMITED 8 Tokyo, Japan
TOKYO ELECTRON LIMITED 1 Minato-ku, Japan
TOKYO ELECTRON LIMITED 1 Tokyo-To, Japan

Recent patent applications by Muraki Yusuke

Yusuke Muraki from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2021-09-16

US20210287906A1

Electricity

Substrate processing method and substrate processing apparatus

#2 | 2016-12-01

US20160351390A1

Electricity

Modification processing method and method of manufacturing semiconductor device

#3 | 2015-12-10

US20150357187A1

Electricity

Modification processing method and method of manufacturing semiconductor device

#4 | 2015-03-12

US20150072533A1

Electricity

Etching method, etching apparatus, and storage medium

#5 | 2012-01-05

US20120000629A1

Electricity

Substrate processing apparatus

#6 | 2012-01-05

US20120000612A1

Electricity

Substrate stage, substrate processing apparatus and substrate processing system

#7 | 2008-10-30

US20080268655A1

Electricity

Method for manufacturing semiconductor device

#8 | 2008-10-16

US20080254636A1

Electricity

Etching of silicon oxide film

#9 | 2006-10-05

US20060219171A1

Electricity

Substrate processing apparatus

InventorID:

6039930 ⎘