Nirasaki
Japan
20
2023-01-19
The entities that hold a legal rights for patent applications filed by inventor Shindo Naoki:
Naoki Shindo from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Etching method and etching apparatus
#2 | 2022-12-01Etching method and etching apparatus
#3 | 2022-10-06SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
#4 | 2022-01-20Etching method and etching apparatus
#5 | 2021-03-25Etching method and etching apparatus
#6 | 2018-04-19Method of forming titanium oxide film and method of forming hard mask
#7 | 2013-12-05Nozzle cleaning device, nozzle cleaning method, and substrate processing apparatus
#8 | 2011-12-01Substrate processing method and non-transitory storage medium for carrying out such method
#9 | 2010-08-19Substrate cleaning method, substrate cleaning apparatus, control program, and computer-readable storage medium
#10 | 2009-04-23Substrate processing apparatus including a drying mechanism using a fluid mixture of purified water and a volatile organic solvent
#11 | 2008-12-18Substrate cleaning method and substrate cleaning apparatus
#12 | 2008-10-30Method for manufacturing semiconductor device
#13 | 2007-11-22Substrate cleaning method, substrate cleaning system and program storage medium
#14 | 2007-10-18Substrate cleaning method, substrate cleaning system and program storage medium
#15 | 2007-09-20Substrate cleaning method, substrate cleaning system and program storage medium
#16 | 2007-08-02Substrate processing system, substrate processing method, recording medium and software
#17 | 2007-05-24Substrate drying processing apparatus, method, and program recording medium
#18 | 2005-04-28Substrate processing apparatus and substrate processing method
#19 | 2005-03-22Substrate processing method and substrate processing apparatus
#20 | 2005-03-10Substrate processing method
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