Yasuhiro Kuga

City:

Koshi

Country:

Japan

Published Applications:

Last publication date:

2023-05-18

Top Assignees for applications by Yasuhiro Kuga

The entities that hold a legal rights for patent applications filed by inventor Kuga Yasuhiro:

Yasuhiro Kuga from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD

Substrate processing apparatus, substrate processing method, and storage medium

Heat treatment apparatus and heat treatment method

Substrate cooling apparatus, substrate cooling method, and storage medium

InventorID:

6049868 ⎘