Koshi
Japan
12
2018-08-16
The entities that hold a legal rights for patent applications filed by inventor Kitano Junichi:
Junichi Kitano from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate liquid processing apparatus
#2 | 2011-10-06Substrate treatment method, coating film removing apparatus, and substrate treatment system
#3 | 2011-06-30Substrate treatment method, coating treatment apparatus, and substrate treatment system
#4 | 2010-03-25Coating film forming apparatus and coating film forming method for immersion light exposure
#5 | 2009-03-26Developing method and developing apparatus
#6 | 2008-08-28Coating/developing apparatus and pattern forming method
#7 | 2008-07-24Substrate treatment method, coating treatment apparatus, and substrate treatment system
#8 | 2008-07-03Substrate processing method, substrate processing system, and computer-readable storage medium
#9 | 2008-05-29Coating film forming apparatus and method
#10 | 2007-06-07Substrate processing apparatus and substrate processing method
#11 | 2007-05-03Developing method and developing apparatus
#12 | 2007-03-29Rinse treatment method, developing treatment method and developing apparatus
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