Koshi
Japan
10
2020-07-23
The entities that hold a legal rights for patent applications filed by inventor Kaneda Masatoshi:
Masatoshi Kaneda from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Transfer device, substrate processing system, transfer method and substrate processing method
#2 | 2017-02-16Substrate processing apparatus and substrate processing system
#3 | 2015-12-24Substrate processing method, substrate processing apparatus, substrate processing system and recording medium
#4 | 2015-10-22Substrate processing apparatus
#5 | 2015-02-05Substrate treatment apparatus, substrate treatment method, and non-transitory storage medium
#6 | 2013-08-08Substrate treatment apparatus, substrate treatment method, and non-transitory storage medium
#7 | 2011-09-29Heating apparatus, heating method, and computer readable storage medium
#8 | 2011-04-14Substrate cooling apparatus, substrate cooling method, and storage medium
#9 | 2008-07-24Heating apparatus, heating method, and computer readable storage medium
#10 | 2008-07-17Substrate processing apparatus, substrate processing method, and computer-readable storage medium
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