Milpitas, California
United States
10
2014-06-12
The entities that hold a legal rights for patent applications filed by inventor Chen Feng:
Feng Chen from Milpitas, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Low tempature tungsten film deposition for small critical dimension contacts and interconnects
#2 | 2014-03-13Method for depositing tungsten film with low roughness and low resistivity
#3 | 2014-01-30Methods of improving tungsten contact resistance in small critical dimension features
#4 | 2014-01-09Methods of forming tensile tungsten films and compressive tungsten films
#5 | 2012-08-09METHODS OF CONTROLLING TUNGSTEN FILM PROPERTIES
#6 | 2010-10-28Method for improving uniformity and adhesion of low resistivity tungsten film
#7 | 2010-10-21Methods for depositing ultra thin low resistivity tungsten film for small critical dimension contacts and interconnects
#8 | 2010-10-21METHOD FOR FORMING TUNGSTEN CONTACTS AND INTERCONNECTS WITH SMALL CRITICAL DIMENSIONS
#9 | 2010-03-04Method for reducing tungsten roughness and improving reflectivity
#10 | 2009-06-11Method for improving uniformity and adhesion of low resistivity tungsten film
605804 ⎘