Axcelis Technologies Inc.

City:

Beverly, Massachusetts

Country:

United States

Published Applications:

Last publication date:

2013-04-25

Top Assignees for applications by Axcelis Technologies Inc.

The entities that hold a legal rights for patent applications filed by inventor Axcelis Technologies Inc.:

Axcelis Technologies Inc. 2 Beverly, MA United States

Recent patent applications by Axcelis Technologies Inc.

Axcelis Technologies Inc. from Beverly, US has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2013-04-25

US20130099131A1

Electricity

Method and apparatus for improved uniformity control with dynamic beam shaping

#2 | 2013-01-31

US20130026356A1

Electricity

System and method for ion implantation with improved productivity and uniformity

InventorID:

60728 ⎘