Nirasaki
Japan
8
2010-01-05
The entities that hold a legal rights for patent applications filed by inventor Maruyama Koji:
Koji Maruyama from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Manufacturing method for membrane member
#2 | 2009-02-19Plasma etching method and apparatus therefor
#3 | 2006-12-28Plasma processing method and high-rate plasma etching apparatus
#4 | 2006-09-28Plasma etching method and apparatus therefor
#5 | 2006-07-13Semiconductor device and method of manufacturing the same
#6 | 2006-03-23Etching method and computer-readable storage medium
#7 | 2005-08-11Plasma processing apparatus and plasma processing method
#8 | 2005-04-28Semiconductor device and method of manufacturing the same
6087440 ⎘