Nirasaki
Japan
5
2020-04-23
The entities that hold a legal rights for patent applications filed by inventor Oka Hiroki:
Hiroki Oka from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate processing apparatus and transfer position correcting method
#2 | 2012-01-19Gate valve cleaning method and substrate processing system
#3 | 2008-07-31Gate valve cleaning method and substrate processing system
#4 | 2008-02-07Intermediate transfer chamber, substrate processing system, and exhaust method for the intermediate transfer chamber
#5 | 2005-11-03Semiconductor processing-purpose substrate detecting method and device, and substrate transfer system
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