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Inventor profile of:

Brian H. BURROWS

City:

San Jose, California

Country:

United States

Published Applications:

Last publication date:

2023-01-26

Top Assignees for applications by Brian H. BURROWS

The entities that hold a legal rights for patent applications filed by inventor BURROWS Brian H.:

Applied Materials, Inc. 16 Santa Clara, CA United States

Recent patent applications by BURROWS Brian H.

Brian H. BURROWS from San Jose, US has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2023-01-26

US20230027683A1

Chemistry; metallurgy

Chamber injector

#2 | 2021-10-21

US20210324514A1

Chemistry; metallurgy

Multi-thermal CVD chambers with shared gas delivery and exhaust system

#3 | 2020-10-22

US20200332437A1

Chemistry; metallurgy

Methods and apparatus for gallium nitride deposition

#4 | 2020-09-17

US20200291523A1

Chemistry; metallurgy

CONTINUOUS CHEMICAL VAPOR DEPOSITION (CVD) MULTI-ZONE PROCESS KIT

#5 | 2020-09-17

US20200290932A1

Chemistry; metallurgy

Methods and apparatus for depositing materials on a continuous substrate

#6 | 2020-04-02

US20200105554A1

Electricity

Purged viewport for quartz dome in epitaxy reactor

#7 | 2020-03-05

US20200071832A1

Chemistry; metallurgy

Chamber injector

#8 | 2019-05-02

US20190132910A1

Electricity

TOOL ARCHITECTURE USING VARIABLE FREQUENCY MICROWAVE FOR RESIDUAL MOISTURE REMOVAL OF ELECTRODES

#9 | 2017-08-24

US20170244006A1

Electricity

PARALLEL PLATE INLINE SUBSTRATE PROCESSING TOOL

#10 | 2017-08-03

US20170221751A1

Electricity

HIGH SPEED EPITAXY SYSTEM AND METHODS

#11 | 2016-12-01

US20160348240A1

Chemistry; metallurgy

HIGH SPEED EPI SYSTEM AND CHAMBER CONCEPTS

#12 | 2016-10-13

US20160298263A1

Chemistry; metallurgy

Process gas preheating systems and methods for double-sided multi-substrate batch processing

#13 | 2015-06-04

US20150155407A1

Electricity

METHODS FOR SUBSTRATE PROCESSING

#14 | 2014-01-16

US20140014745A1

Chemistry; metallurgy

Multi-gas straight channel showerhead

#15 | 2012-02-02

US20120024388A1

Chemistry; metallurgy

Multi-gas straight channel showerhead

#16 | 2011-05-26

US20110121503A1

Electricity

CVD APPARATUS

#17 | 2011-03-31

US20110076400A1

Chemistry; metallurgy

NANOCRYSTALLINE DIAMOND-STRUCTURED CARBON COATING OF SILICON CARBIDE

#18 | 2011-03-03

US20110049779A1

Electricity

SUBSTRATE CARRIER DESIGN FOR IMPROVED PHOTOLUMINESCENCE UNIFORMITY

#19 | 2010-10-14

US20100261340A1

Electricity

Methods for fabricating group III nitride structures with a cluster tool

#20 | 2010-08-26

US20100215854A1

Chemistry; metallurgy

HVPE SHOWERHEAD DESIGN

#21 | 2010-04-27

US10261391

High temperature anneal with improved substrate support

#22 | 2009-08-06

US20090194026A1

Chemistry; metallurgy

PROCESSING SYSTEM FOR FABRICATING COMPOUND NITRIDE SEMICONDUCTOR DEVICES

#23 | 2009-08-06

US20090194024A1

Chemistry; metallurgy

CVD APPARATUS

#24 | 2009-04-16

US20090098276A1

Chemistry; metallurgy

Multi-gas straight channel showerhead

#25 | 2008-12-25

US20080314317A1

Chemistry; metallurgy

SHOWERHEAD DESIGN WITH PRECURSOR PRE-MIXING

#26 | 2008-12-25

US20080314311A1

Chemistry; metallurgy

HVPE SHOWERHEAD DESIGN

#27 | 2008-11-27

US20080289575A1

Chemistry; metallurgy

METHODS AND APPARATUS FOR DEPOSITING A GROUP III-V FILM USING A HYDRIDE VAPOR PHASE EPITAXY PROCESS

#28 | 2008-11-13

US20080276860A1

Chemistry; metallurgy

CROSS FLOW APPARATUS AND METHOD FOR HYDRIDE VAPOR PHASE DEPOSITION

#29 | 2008-03-27

US20080072820A1

Electricity

MODULAR CVD EPI 300MM REACTOR

#30 | 2008-01-24

US20080017117A1

Electricity

SUBSTRATE SUPPORT WITH ADJUSTABLE LIFT AND ROTATION MOUNT

#31 | 2008-01-24

US20080017116A1

Electricity

SUBSTRATE SUPPORT WITH ADJUSTABLE LIFT AND ROTATION MOUNT

InventorID:

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