Nirasaki
Japan
6
2019-04-11
The entities that hold a legal rights for patent applications filed by inventor Morisawa Daisuke:
Daisuke Morisawa from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Method of processing target substrate
#2 | 2014-04-24Substrate processing system and substrate transfer control method
#3 | 2014-04-24Substrate processing apparatus
#4 | 2009-06-04Substrate processing apparatus, program, storage medium and conditioning necessity determining method
#5 | 2008-12-11Control device of substrate processing apparatus and control program therefor
#6 | 2006-10-05Substrate processing apparatus, history information recording method, history information recording program, and history information recording system
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