Nirasaki
Japan
8
2023-04-13
The entities that hold a legal rights for patent applications filed by inventor Matsui Hidefumi:
Hidefumi Matsui from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
PROCESS ESTIMATION SYSTEM, PROCESS DATA ESTIMATION METHOD, AND RECORDING MEDUIM
#2 | 2013-04-18Vacuum exhaust method and a substrate processing apparatus therefor
#3 | 2013-03-07Substrate cleaning method and substrate cleaning device
#4 | 2012-02-09Substrate cleaning method
#5 | 2010-04-29Substrate cleaning method and apparatus
#6 | 2007-06-07Substrate processing apparatus and substrate processing method
#7 | 2007-04-24Substrate processing apparatus and substrate processing method
#8 | 2005-04-05Substrate processing method and substrate processing apparatus
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