Tomohiro Suzuki

City:

Nirasaki

Country:

Japan

Published Applications:

Last publication date:

2015-03-12

Top Assignees for applications by Tomohiro Suzuki

The entities that hold a legal rights for patent applications filed by inventor Suzuki Tomohiro:

TOKYO ELECTRON LIMITED 9 Tokyo, Japan
TOKYO ELECTRON LIMITED 3 Minato-ku, Japan
Tokyo Electron Limited 1 Minato-ku, Tokyo, Japan
MASAFUMI ITO 1 Sennan-gun, Japan

Recent patent applications by Suzuki Tomohiro

Tomohiro Suzuki from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2015-03-12

US20150072533A1

Electricity

Etching method, etching apparatus, and storage medium

#2 | 2011-08-25

US20110207245A1

Mechanical engineering

Stage, substrate processing apparatus, plasma processing apparatus, control method for stage, control method for plasma processing apparatus, and storage media

#3 | 2011-02-10

US20110033175A1

Electricity

Annealing apparatus

#4 | 2010-12-16

US20100314377A1

Electricity

Annealing device

#5 | 2010-02-18

US20100038833A1

Electricity

Annealing apparatus

#6 | 2008-09-18

US20080226272A1

Electricity

Heating apparatus, heat treatment apparatus, computer program and storage medium

#7 | 2007-06-07

US20070127034A1

Physics

Method for measuring physical quantity of measurement object in substrate processing apparatus and storage medium storing program for implementing the method

#8 | 2007-04-19

US20070084847A1

Mechanical engineering

Stage, substrate processing apparatus, plasma processing apparatus, control method for stage, control method for plasma processing apparatus, and storage media

#9 | 2005-12-08

US20050271116A1

Physics

Method and apparatus for measuring temperature of substrate

InventorID:

6134686 ⎘