Koshi
Japan
2
2006-09-07
The entities that hold a legal rights for patent applications filed by inventor Tanaka Michio:
Michio Tanaka from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Method of setting focus condition at time of exposure, apparatus for setting focus condition at time of exposure, program, and computer readable recording medium
#2 | 2006-09-07Method of setting processing condition in photolithography process, apparatus for setting processing condition in photolithography process, program, and computer readable recording medium
6135439 ⎘