Mitsuhiro Okada

City:

Kai

Country:

Japan

Published Applications:

Last publication date:

2008-11-06

Top Assignees for applications by Mitsuhiro Okada

The entities that hold a legal rights for patent applications filed by inventor Okada Mitsuhiro:

Mitsuhiro Okada from Kai, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Film formation method and apparatus for semiconductor process

Film formation apparatus and method of using the same

Method and apparatus for forming silicon-containing insulating film

Method and apparatus for forming silicon nitride film

Film formation method and apparatus for semiconductor process for forming a silicon nitride film

InventorID:

6136488 ⎘