Nirasaki
Japan
12
2020-04-09
The entities that hold a legal rights for patent applications filed by inventor Sato Manabu:
Manabu Sato from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Plasma processing apparatus and method
#2 | 2017-02-02Plasma processing apparatus and method
#3 | 2016-12-29Plasma processing apparatus and method
#4 | 2014-05-08Plasma processing apparatus and method
#5 | 2011-11-10Plasma processing apparatus and method
#6 | 2011-04-21Plasma processing apparatus, plasma processing method, and storage medium
#7 | 2008-09-25Plasma processing method
#8 | 2007-09-27Plasma processing method
#9 | 2007-07-19Plasma etching method and computer-readable storage medium
#10 | 2006-09-14Etching method and apparatus
#11 | 2006-03-30Plasma processing apparatus and method
#12 | 2006-02-23Plasma processing apparatus and method
6140738 ⎘