Nirasaki
Japan
4
2011-09-08
The entities that hold a legal rights for patent applications filed by inventor Ooyabu Jun:
Jun Ooyabu from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Plasma processing method and apparatus
#2 | 2007-07-26Focus ring and plasma processing apparatus
#3 | 2005-12-08Plasma processing apparatus and method, and electrode plate for plasma processing apparatus
#4 | 2005-11-24Plasma processing apparatus and method
6147734 ⎘