Tetsuya Shibata

City:

Nirasaki

Country:

Japan

Published Applications:

Last publication date:

2011-08-18

Top Assignees for applications by Tetsuya Shibata

The entities that hold a legal rights for patent applications filed by inventor Shibata Tetsuya:

TOKYO ELECTRON LIMITED 9 Tokyo, Japan
Tokyo Electron Limited 2 , Japan

Recent patent applications by Shibata Tetsuya

Tetsuya Shibata from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2011-08-18

US20110201210A1

Chemistry; metallurgy

Film formation method, film formation apparatus, and method for using film formation apparatus

#2 | 2010-06-17

US20100148241A1

Electricity

Semiconductor device and method of manufacturing the same

#3 | 2010-06-03

US20100135877A1

Chemistry; metallurgy

Method for removing metal impurity from quartz component part used in heat processing apparatus of batch type

#4 | 2010-01-21

US20100013000A1

Electricity

Memory apparatus

#5 | 2009-10-22

US20090263975A1

Electricity

Film formation method and apparatus for forming silicon-containing insulating film doped with metal

#6 | 2008-08-21

US20080200038A1

Chemistry; metallurgy

Heat processing method and apparatus for semiconductor process

#7 | 2008-06-12

US20080139001A1

Electricity

Method for processing polysilazane film

#8 | 2007-12-27

US20070298621A1

Electricity

Baking method of quartz products, computer program and storage medium

#9 | 2006-06-15

US20060128161A1

Electricity

Film formation method and apparatus for semiconductor process

InventorID:

6166337 ⎘