Nirasaki
Japan
22
2022-11-17
The entities that hold a legal rights for patent applications filed by inventor Shindo Takehiro:
Takehiro Shindo from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
SUBSTRATE PROCESSING SYSTEM AND METHOD OF ESTIMATING HEIGHT OF ANNULAR MEMBER
#2 | 2022-10-27SUBSTRATE TRANSFER DEVICE AND METHOD OF COOLING ARM
#3 | 2022-10-20Substrate transfer device and substrate transfer method
#4 | 2022-10-06Apparatus for transporting substrate, system for processing substrate, and method of transporting substrate
#5 | 2022-09-22Apparatus for processing substrate and method of transferring substrate
#6 | 2022-09-08Substrate transfer device and substrate processing system
#7 | 2022-06-23Method of delivering substrate, and substrate delivery system
#8 | 2022-06-09CORRECTION METHOD AND SUBSTRATE TRANSFER APPARATUS
#9 | 2022-03-03Method of controlling substrate transfer system and the substrate transfer system
#10 | 2022-01-20Substrate transport system and substrate transport method
#11 | 2021-08-19Teaching method
#12 | 2020-08-06Semiconductor manufacturing apparatus and method of controlling rotation of stage
#13 | 2020-04-23Substrate processing apparatus and transfer position correcting method
#14 | 2020-03-26Transport apparatus, semiconductor manufacturing apparatus, and transport method
#15 | 2019-11-21Substrate processing apparatus
#16 | 2012-05-24Substrate collecting method
#17 | 2012-05-10Vacuum processing apparatus
#18 | 2010-02-11Substrate position detection apparatus, and method of adjusting a position of an imaging component of the same
#19 | 2009-12-31Vacuum processing apparatus
#20 | 2009-06-04Bevel/backside polymer removing method and device, substrate processing apparatus and storage medium
#21 | 2006-09-21Transportation apparatus and drive mechanism
#22 | 2006-07-27Vacuum processing apparatus
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