Nirasaki
Japan
7
2011-07-07
The entities that hold a legal rights for patent applications filed by inventor Endoh Shosuke:
Shosuke Endoh from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component
#2 | 2011-03-03Plasma processing apparatus and focus ring
#3 | 2011-01-06Plasma processing apparatus, focus ring, and susceptor
#4 | 2010-12-14Plasma processing apparatus and focus ring
#5 | 2009-10-20Method for coating internal member having holes in vacuum processing apparatus and the internal member having holes coated by using the coating method
#6 | 2006-11-16Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component
#7 | 2005-01-20Processing apparatus and gas discharge suppressing member
6169154 ⎘