Tsuyoshi Shibata

City:

Koshi

Country:

Japan

Published Applications:

Last publication date:

2011-10-06

Top Assignees for applications by Tsuyoshi Shibata

The entities that hold a legal rights for patent applications filed by inventor Shibata Tsuyoshi:

TOKYO ELECTRON LIMITED 9 Tokyo, Japan
TOKYO ELECTRON LIMITED 3 Minato-ku, Japan
Tokyo Electron Limited 1 Minato-ku, Tokyo, Japan

Recent patent applications by Shibata Tsuyoshi

Tsuyoshi Shibata from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2011-10-06

US20110242513A1

Physics

Substrate processing method, computer-readable storage medium and substrate processing system

#2 | 2011-04-14

US20110086514A1

Electricity

Substrate processing method

#3 | 2010-12-23

US20100323306A1

Electricity

Substrate treatment system, substrate treatment method, and computer readable storage medium

#4 | 2009-10-29

US20090269686A1

Physics

Substrate processing method, computer-readable storage medium and substrate processing system

#5 | 2009-07-16

US20090181316A1

Physics

Substrate processing method, program, computer-readable storage medium, and substrate processing system

#6 | 2009-01-15

US20090014125A1

Electricity

Substrate processing system and method

#7 | 2007-12-27

US20070298188A1

Electricity

Substrate processing apparatus

#8 | 2007-08-16

US20070190246A1

Electricity

Substrate treatment system, substrate treatment method, and computer readable storage medium

#9 | 2007-08-09

US20070181557A1

Electricity

Heat treatment apparatus, heat treatment method, and computer readable storage medium

InventorID:

6170232 ⎘