Takehiro Ueda

City:

Nirasaki

Country:

Japan

Published Applications:

Last publication date:

2012-01-12

Top Assignees for applications by Takehiro Ueda

The entities that hold a legal rights for patent applications filed by inventor Ueda Takehiro:

Takehiro Ueda from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Plasma processor and plasma processing method

Plasma procesor and plasma processing method

Substrate mounting table and method for manufacturing same, substrate processing apparatus, and fluid supply mechanism

Apparatus and method for evaluating a substrate mounting device

Electrostatic chuck

InventorID:

6173259 ⎘