Nirasaki
Japan
4
2022-10-27
The entities that hold a legal rights for patent applications filed by inventor Okabe Tsuneyuki:
Tsuneyuki Okabe from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Raw material supply apparatus and raw material supply method
#2 | 2018-09-13Substrate processing apparatus
#3 | 2010-03-18Semiconductor manufacturing plant
#4 | 2009-03-05Semiconductor fabrication system, and flow rate correction method and program for semiconductor fabrication system
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