Nirasaki
Japan
15
2020-06-11
The entities that hold a legal rights for patent applications filed by inventor Sekiguchi Kenji:
Kenji Sekiguchi from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate processing apparatus and substrate processing method
#2 | 2012-10-18Liquid processing method, liquid processing apparatus and storage medium
#3 | 2011-04-21Substrate liquid processing apparatus, substrate liquid processing method, and storage medium having substrate liquid processing program stored therein
#4 | 2010-12-09Substrate processing method and substrate processing apparatus
#5 | 2010-08-19Substrate cleaning method, substrate cleaning apparatus, control program, and computer-readable storage medium
#6 | 2009-08-20Substrate processing apparatus, substrate processing method, and storage medium
#7 | 2008-10-16Substrate cleaning method, substrate cleaning equipment, computer program, and program recording medium
#8 | 2008-06-05Substrate processing apparatus and substrate processing method
#9 | 2008-04-29Substrate processing apparatus and substrate processing method
#10 | 2008-02-21Substrate cleaning method and computer readable storage medium
#11 | 2007-08-02Substrate cleaning apparatus, substrate cleaning method, and medium for recording program used for the method
#12 | 2007-06-21Two-fluid nozzle for cleaning substrate and substrate cleaning apparatus
#13 | 2007-04-12Resist film removing method
#14 | 2007-01-25Substrate processing method and substrate processing apparatus
#15 | 2006-03-14Substrate cleaning tool and substrate cleaning apparatus
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