Nirasaki
Japan
6
2022-03-31
The entities that hold a legal rights for patent applications filed by inventor Kobayashi Hirokatsu:
Hirokatsu Kobayashi from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Film forming method and film forming apparatus
#2 | 2010-04-15Film deposition apparatus and film deposition method
#3 | 2010-02-25Film forming apparatus and method
#4 | 2010-01-21Film deposition apparatus and method
#5 | 2007-08-30Film forming apparatus, film forming method, program and storage medium
#6 | 2005-08-02Single wafer processing method and system for processing semiconductor
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