Yasuhiro Oshima

City:

Nirasaki

Country:

Japan

Published Applications:

Last publication date:

2007-06-14

Top Assignees for applications by Yasuhiro Oshima

The entities that hold a legal rights for patent applications filed by inventor Oshima Yasuhiro:

Yasuhiro Oshima from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Plasma process device and plasma process method

Cleaning method of treatment equipment and treatment equipment

Gas switching mechanism for plasma processing apparatus

Cleaning method for substrate treatment device and substrate treatment device

InventorID:

6185069 ⎘