Sunnyvale, California
United States
3
2014-07-17
The entities that hold a legal rights for patent applications filed by inventor DINSMORE ROBERT:
ROBERT DINSMORE from Sunnyvale, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Finned shutter disk for a substrate process chamber
#2 | 2014-07-17In situ chamber clean with inert hydrogen helium mixture during wafer process
#3 | 2014-01-23Two piece shutter disk assembly for a substrate process chamber
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