Koshi
Japan
24
2018-10-25
The entities that hold a legal rights for patent applications filed by inventor Kyouda Hideharu:
Hideharu Kyouda from Koshi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Liquid processing apparatus
#2 | 2017-03-30Developing method, developing apparatus and storage medium
#3 | 2017-02-16Developing apparatus, developing method and storage medium
#4 | 2015-02-05Developing apparatus, developing method and storage medium
#5 | 2015-02-05Developing method, developing apparatus and storage medium
#6 | 2015-01-29Liquid processing apparatus
#7 | 2015-01-29Substrate cleaning apparatus, substrate cleaning method, and storage medium
#8 | 2013-11-07Coating and developing apparatus, coating film forming method, and storage medium storing program for performing the method
#9 | 2012-06-07Coating and developing apparatus, coating and developing method, and storage medium
#10 | 2011-10-06Substrate treatment method, coating film removing apparatus, and substrate treatment system
#11 | 2011-08-18Substrate treatment method
#12 | 2011-06-30Substrate treatment method, coating treatment apparatus, and substrate treatment system
#13 | 2011-06-02Developing device and developing method
#14 | 2010-12-30Developing apparatus and developing method
#15 | 2010-09-16Coating and developing apparatus, coating and developing method, and storage medium
#16 | 2010-03-25Coating film forming apparatus and coating film forming method for immersion light exposure
#17 | 2009-05-21Development device and development method
#18 | 2008-07-24Substrate treatment method, coating treatment apparatus, and substrate treatment system
#19 | 2008-07-03Substrate processing method, substrate processing system, and computer-readable storage medium
#20 | 2008-05-29Coating film forming apparatus and method
#21 | 2007-09-13Coating and developing apparatus, coating film forming method, and storage medium storing program for performing the method
#22 | 2007-08-09Coating and developing method, coating and developing system and storage medium
#23 | 2007-08-09Developing device and developing method
#24 | 2007-03-01Substrate cleaning device and substrate cleaning method
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