Nirasaki
Japan
3
2010-06-24
The entities that hold a legal rights for patent applications filed by inventor Ozawa Jun:
Jun Ozawa from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program
#2 | 2009-12-10Processed object processing apparatus, processed object processing method, pressure control method, processed object transfer method, and transfer apparatus
#3 | 2006-05-18Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program
6191527 ⎘